140CPU11303

140CPU11303步進電機的輸出力矩隨轉速升高而下降，且在較高轉速時會急劇下降，所以其高工作轉速一般在300～600RPM。交流伺服電機為恒力矩輸出，即在其額定轉速（一般為2000RPM或3000RPM）以內，都能輸出額定轉矩，在額定轉速以上為恒功率輸出。

步進電機一般不具有過載能力。交流伺服電機具有較強的過載能力。以三洋交流伺服系統(tǒng)為例，它具有速度過載和轉矩過載能力。其大轉矩為額定轉矩的二到三倍，可用于克服慣性負載在啟動瞬間的慣性力矩。步進電機因為沒有這種過載能力，在選型時為了克服這種慣性力矩，往往需要選取較大轉矩的電機，而機器在正常工作期間又不需要那么大的轉矩，便出現(xiàn)了力矩浪費的現(xiàn)象。

步進電機的控制為開環(huán)控制，啟動頻率過高或負載過大易出現(xiàn)丟步或堵轉的現(xiàn)象，停止時轉速過高易出現(xiàn)過沖的現(xiàn)象，所以為保證其控制精度，應處理好升、降速問題。交流伺服驅動系統(tǒng)為閉環(huán)控制，驅動器可直接對電機編碼器反饋信號進行采樣，內部構成位置環(huán)和速度環(huán)，一般不會出現(xiàn)步進電機的丟步或過沖的現(xiàn)象，控制性能更為可靠。

KLA-Tencor Retrofit Optics Beamsplitter 0099602-001 

KLA-Tencor SLX Objective Lens 760-334096-000 Untested

KLA-Tencor 395005 Tropel 14X CYL Telescope-1 AIT2 

KLA-Tencor AIT UV COLL Side Polarizer 0024476-001 

KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 

KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 

KLA-Tencor Cannon Box Magazine Assembly 740-060658-001

KLA Tencor 710-711754-00 Autofocus Board

KLA Tencor 710-711567-00 Communication interface II

KLA Tencor X/Y Interface 710-720011-01 Rev B6

KLA Tencor Sensor Buffer Board 710-710199-01

KLA Tencor Illumination Control 710-713250-01

KLA Tencor Cassette Controller Board 710-711879-01

KLA-Tencor SM300 (SpectraMap) Thin Film Mapping Tool 

KLA-Tencor Wafer APS3 board AIT3 assy 546801 Rev: AC

COMDEL CPS SERIES RF GENERATOR KLA TENCOR POWER SUPPLY

Sony KLA-Tencor AIT 1 PowerHAD Camera DXC-950 CMA-D2

KLA TENCOR XYI ASSY 710-610391-000/AB SN P841002056 REV

KLA-Tencor AIT APS Tower/Center Block 0071149-001 Used

KLA-Tencor AIT3XP APS NIC Tower 0034693-001 

KLA Tencor MMD analog AIT UV 0021488-005 Rev. AA

KLA Tencor MMD analog AIT UV 0052196-007

KLA Tencor MMD analog AIT UV 0021488-004 Rev AA

KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used

KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used

KLA-Tencor AIT 2 GPIO Board 386065 working

KLA-Tencor Lid Lift Leg Assy. 781-11759-000 working

KLA-Tencor CIP XP Column Extension Assy. 0110157-000

KLA-Tencor 486i Controller 0020839 Rev.AA working

KLA-Tencor High Voltage Control Module 52-1081

KLA-Tencor CRS2000 Olympus Microscope Turret BH3-5NRE-M

KLA-Tencor AIT 2 PSF Driver Board 556661 working

KLA-Tencor AIT 2 4-Channel Motor Control Board 363251

KLA-Tencor AIT 2 4-Channel Motor Control 261408 working

KLA-Tencor AIT 2 U500 Control Board 690D1470 working

KLA-Tencor Quantox High Voltage Control Module 52-1081

KLA-Tencor 8100 200mm XY Stage 780-10480-001 working

KLA-Tencor CRS1010 Camera Lens Filter 002001

KLA-Tencor CRS1010 Lens Filter Assy. 000056 working

KLA-Tencor 710-663106-001 Dual Stepper Driver 2 

KLA-Tencor EDrawer Hardware RETR Kit 5.2 STD 2139

KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000

KLA-Tencor AIT2 Power Assembly LPM 390500

KLA-Tencor CRS1010 Camera Filter Assy. 000056 working

KLA-Tencor CRS1010 Lens Filter Assy. 002001 working

KLA-Tencor Glentek Electronics Analyzer 0045454-000 

KLA-Tencor SLX RF Bench Assy. 740-336864-001 untested

KLA-Tencor Rotary Transfer Arm 720-07360-000

KLA-Tencor XP Objective Lens 0110155-000 Untested

KLA-Tencor port AIT3 Mask Changer 556190 

KLA-Tencor Laser Mod 0124593-000 

KLA-Tencor AIT UV Laser Servo Detector 0099586-001 

KLA Tencor 710-710112-01 Mechanical Drive Board

KLA Tencor 710-710112-00 Mechanical Drive Board

KLA Tencor 710-710112-01 Mechanical Drive Board

KLA Tencor 710-710112-00 Mechanical Drive Board

KLA Tencor PN: 770-809195-000 Image Processor Board 

KLA-Tencor GPIO assy: 0052412-001 Rev: AA

KLA Tencor robot DISTR AIT2 530352 P/N 0035531-000

KLA TENCOR FELL PROBE HEAD TYPE C 50-0002-03

KLA-Tencor Upper Housing Assy. 781-21332-000 working

KLA-Tencor Sony DXC-950P PowerHAD 3CCD Video Camera

KLA - Tencor GPIO ASSY Board 0052412-001 REV.AB 

KLA-Tencor 395056 Tropel 2X mag conv lens 

KLA Tencor P/N 770-809195-000

KLA-Tencor port NNC, AIT3, XP Polarizer 0044232-001

KLA-Tencor AIT 2 Illumination Board 556700 working

Sony KLA-Tencor AIT 2 PowerHAD Camera DXC-950 363170

KLA-Tencor Slide 12V Power Supply 740-658138-00 working

KLA-Tencor Quantox Head Control Module 64020 working

KLA-Tencor AIT 2 Servo Box Assy. 0039978-000 working

KLA-Tencor 740-693218-001 Extron ADA 4 300MX HV 2139

KLA-Tencor AIT1 Tropel 14X Anamorphic Telescope

KLA-Tencor AIT1 Ultrapointe Fast Z Controller PCB

KLA-Tencor SLX Chirp Cell 760-333918-000

KLA-Tencor 10KV Floodgun Assembly 720-23189-000 

KLA-Tencor Spring Clamp Laser Servo Detect. 0124592-000

KLA-Tencor AIT/UV Laser Servo Detector 0099572-000 

KLA-Tencor SLX Dog/Wag Assembly 760-333026-001

KLA-Tencor Left Cassette Nest, 5.2 740-694842-000 

KLA - Tencor optics assembly 2xxx 0024939-000 Y-Mirror

KLA-Tencor PCB ASSY , INTF-DIAG , ES32 

KLA-Tencor AIT 2 VAS Buffer Assy. 0034223-000 working

KLA-Tencor Aperture Heated Rod 781-23234-002 Used

KLA-Tencor Aperture Heated Rod 781-23234-001 Used

KLA-Tencor 3XX-I Reflected Light Detector760-321399-000

KLA-Tencor Laser Servo Detector 0062032-000 Refurbished

KLA-Tencor AMS Assembly 720-4800036-002 Used

KLA-Tencor X-Scanner Assembly 760-032324-00 

KLA Tencor PSF driver 0031663-000

KLA-Tencor RS100 Equipe Robot End Effector working

KLA-Tencor 64060 Distribution Module working

KLA-Tencor 301 I-Line RF Bench 740-323100-002 untested

KLA-Tencor SLX Telescope Turret 740-333024-001 untested

KLA-Tencor Quantox Distribution Module 64060 working

KLA-Tencor Optics RF Bench Assy. 740-058089-00 untested

KLA-Tencor 0092173-001 Hamamtsu L9519-01 D2 HB Lamp 

KLA-Tencor AIT Laser Servo Detector Assy. 0099586-000